Abstract
MicroLED display is considered one of the most promising technologies for next-generation displays. However, the high manufacturing cost has been a major obstacle to its accessibility to the general consumer market, and mass transfer, an essential process to achieve cost-effective manufacturing, has not yet reached commercial maturity. Critical issues, such as microLED chips, transfer equipments, and process materials, need to be addressed for the mass transfer technologies. In this work, we present a 1.63-inch full color microLED display module fabricated with laser mass transfer, which has a pixel density of 403 pixels per inch (PPI), the highest resolution ever achieved in the industry using mass transfer technologies. The laser mass transfer is realized with three process nodes: laser lift-off, laser induced forward transfer, and carrier bonding. Each node has been well explored to improve yields. Insights into the present progress and the future development of the laser mass transfer will be shared in this work.
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Acknowledgements
This work was supported in part by National Key Research and Development Program (Grant No. 2022YF-F0609504), National Natural Science Foundation of China (Grant Nos. 62174141, 61874090), Key Scientific and Technological Program of Xiamen (Grant No. 3502Z20231048), and Natural Science Foundation of Fujian Province of China (Grant No. 2021J01008).
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Yang, X., Li, J., Peng, X. et al. Super retina TFT based full color microLED display via laser mass transfer. Sci. China Inf. Sci. 67, 210401 (2024). https://doi.org/10.1007/s11432-024-4111-9
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DOI: https://doi.org/10.1007/s11432-024-4111-9
