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Nanomechanical mass sensor for monitoring deposition rates through confined apertures (Q61825317)

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    Nanomechanical mass sensor for monitoring deposition rates through confined apertures
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      Nanomechanical mass sensor for monitoring deposition rates through confined apertures (English)
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      Julien Arcamone
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      Jaume Verd
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      Nuria Barniol
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      Marc A.F. van den Boogaart
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      Juergen Brugger
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      2009
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