Ultra-High Vacuum Cells Realized by Miniature Ion Pump Using High-Efficiency Plasma Source.

Takashi Matsumae

Yuichi Kurashima Atsuhiko Maeda Naoto Oshima Taisei Motomura Takashi Matsumae Mitsuhiro Watanabe Hideki Takagi Ultra-High Vacuum Cells Realized by Miniature Ion Pump Using High-Efficiency Plasma Source. 4000 2024 June 24 Sensors 12 https://doi.org/10.3390/s24124000 db/journals/sensors/sensors24.html#KurashimaMOMMWT24

Yuichi Kurashima Taisei Motomura Shinya Yanagimachi Takashi Matsumae Mitsuhiro Watanabe Hideki Takagi High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps. 1040 2023 January 23 Sensors 2 https://doi.org/10.3390/s23021040 db/journals/sensors/sensors23.html#KurashimaMYMWT23

Takashi Matsumae Shingo Kariya Yuichi Kurashima Le Hac Huong Thu Eiji Higurashi Masanori Hayase Hideki Takagi Wafer-Scale Room-Temperature Bonding of Smooth Au/Ti-Based Getter Layer for Vacuum Packaging. 8144 2022 22 Sensors 21 https://doi.org/10.3390/s22218144 db/journals/sensors/sensors22.html#MatsumaeKKTHHT22

Michitaka Yamamoto Takashi Matsumae Yuichi Kurashima Hideki Takagi Tadatomo Suga Toshihiro Itoh Eiji Higurashi Growth Behavior of Au Films on SiO<sub>2</sub> Film and Direct Transfer for Smoothing Au Surfaces. 254-260 2019 13 Int. J. Autom. Technol. 2 https://doi.org/10.20965/ijat.2019.p0254 db/journals/ijat/ijat13.html#YamamotoMKTSIH19

Masanori Hayase Eiji Higurashi Toshihiro Itoh Shingo Kariya Yuichi Kurashima Atsuhiko Maeda Taisei Motomura Naoto Oshima Tadatomo Suga Hideki Takagi Le Hac Huong Thu Mitsuhiro Watanabe Michitaka Yamamoto Shinya Yanagimachi