An energy-efficient FeFET-based computing-in-memory macro using BEOL-integrated HZO ferroelectric capacitors.

Weizeng Li Zhidao Zhou Linfang Wang Junyu Zhu Junzhe Shen Hongyang Hu Baihan Wang Zhi Li 0062 Wang Ye Zhongze Han Hanghang Gao Chunmeng Dou An energy-efficient FeFET-based computing-in-memory macro using BEOL-integrated HZO ferroelectric capacitors. 2025 68 Sci. China Inf. Sci. 10 https://doi.org/10.1007/s11432-025-4454-2 db/journals/chinaf/chinaf68.html#LiZWZSHWLYHGD25 streams/journals/chinaf